天眼查APP顯示，近日，杭州中為光電技術有限公司,浙江晶盛機電股份有限公司,浙江晶瑞電子材料有限公司申請的“晶圓拋光研磨下片緩存裝置及下片方法”專利獲(huo)授(shou)權。摘要(yao)顯(xian)示，本(ben)申請(qing)公開(kai)了(le)一種晶(jing)(jing)圓拋光研磨下片(pian)(pian)(pian)緩(huan)存裝(zhuang)置(zhi)(zhi)(zhi)(zhi)及下片(pian)(pian)(pian)方法，涉及半(ban)導體制(zhi)造(zao)技(ji)術領域(yu)，晶(jing)(jing)圓拋光研磨下片(pian)(pian)(pian)緩(huan)存裝(zhuang)置(zhi)(zhi)(zhi)(zhi)包括水槽(cao)、多個固(gu)(gu)定(ding)(ding)(ding)支(zhi)架(jia)(jia)和多個運(yun)(yun)動(dong)支(zhi)架(jia)(jia)。水槽(cao)頂部開(kai)口且四(si)周和底(di)部封閉。固(gu)(gu)定(ding)(ding)(ding)支(zhi)架(jia)(jia)固(gu)(gu)定(ding)(ding)(ding)于水槽(cao)底(di)部并沿著水槽(cao)底(di)部間隔(ge)設置(zhi)(zhi)(zhi)(zhi)，每個固(gu)(gu)定(ding)(ding)(ding)支(zhi)架(jia)(jia)能(neng)夠(gou)(gou)容納至少(shao)一片(pian)(pian)(pian)晶(jing)(jing)圓。運(yun)(yun)動(dong)支(zhi)架(jia)(jia)和固(gu)(gu)定(ding)(ding)(ding)支(zhi)架(jia)(jia)交替設置(zhi)(zhi)(zhi)(zhi)，且每個運(yun)(yun)動(dong)支(zhi)架(jia)(jia)能(neng)夠(gou)(gou)容納至少(shao)一片(pian)(pian)(pian)晶(jing)(jing)圓；運(yun)(yun)動(dong)支(zhi)架(jia)(jia)沿水槽(cao)高度方向(xiang)可升(sheng)降設置(zhi)(zhi)(zhi)(zhi)。當需要(yao)放(fang)置(zhi)(zhi)(zhi)(zhi)晶(jing)(jing)圓時(shi)，運(yun)(yun)動(dong)支(zhi)架(jia)(jia)上升(sheng)，對應晶(jing)(jing)圓能(neng)夠(gou)(gou)同時(shi)放(fang)置(zhi)(zhi)(zhi)(zhi)于運(yun)(yun)動(dong)支(zhi)架(jia)(jia)和固(gu)(gu)定(ding)(ding)(ding)支(zhi)架(jia)(jia)上，且運(yun)(yun)動(dong)支(zhi)架(jia)(jia)和固(gu)(gu)定(ding)(ding)(ding)支(zhi)架(jia)(jia)上的晶(jing)(jing)圓相互平行。通(tong)過上述設置(zhi)(zhi)(zhi)(zhi)，本(ben)申請(qing)實現了(le)單次(ci)放(fang)置(zhi)(zhi)(zhi)(zhi)多片(pian)(pian)(pian)晶(jing)(jing)圓進行緩(huan)存的技(ji)術效(xiao)果(guo)，提(ti)高了(le)下片(pian)(pian)(pian)效(xiao)率的同時(shi)也減少(shao)了(le)機械手的占用時(shi)間。